Oxygen content % | Dew Point oC | Vacuum Pressure mbar | Vacuum Pressure torr | Vacuum Pressure kPa |
21 | +61 | 1013 | 760 | 101 |
7.7 | +40 | 378 | 284 | 37.8 |
2.8 | +23 | 137 | 103 | 13.7 |
1™ | +7 | 45™ | 34™ | 4.5 |
0.38 | -5 | 18 | 14 | 1.8 |
0.14 | -16 | 6.9 | 5.2 | 0.7 |
0.05(500ppm) | -26 | 2.4 | 1.8 | 2.4x10‐¹ |
0.019 | -36 | 1 | 0.75 | 1x10‐¹ |
0.007 | -45 | 3x10‐¹ | 2x10‐¹ | 3x10‐² |
0.0025(25ppm) | -54 | 1x10‐¹ | 7.5x10‐² | 1x10‐² |
0.0009(9ppm) | -61 | 5x10‐² | 4x10‐² | 5x10‐³ |
0.0001(1ppm) | -65 | 5x10‐³ | 4x10‐³ | 5x10‐⁴ |
0.000006 | -80 | 3x10‐⁴ | 2.3x10‐⁴ | 0.3x10‐⁴ |
™ : Limit to avoid Limit to avoid exploding
(1) : Gas Tight Metal Chamber with a ceramic fiber sealing under Ar gas atmosphere
<100ppm(0.01%) : Gas Tight Metal Chamber with a silcone(viton) ruber sealing under Ar gas atmosphere(출처 : nabertherm)
<25 ppm : Gas Tight Metal Chamber with a silcone(viton) ruber sealing under pre-vacuum & Ar gas atmosphere(출처 : 3d systems)